Because of the rapid growth of semiconductor technology, a more complicated production process with increased difficulties is expected. The capability of today's harsh-process dry vacuum pumps represented a giant leap forward in pumping technology. The dry vacuum pump nowadays must not only evacuate and maintain a constant vacuum for the process chamber, but it must also have the capacity to support the abatement difficulties. The Hanbell iPH Series dry vacuum pump, fortunately, fits all these requirements. The iPH Series screw pumps provide a great capability for wide applications, especially in the harsh process. The excellent pump performance comes from the shortest gas path of rotors and brilliant rotor profile sealing design.
MAIN FEATURES
- Designed by Hanbell and 100% made in Taiwan.
- 25% power saving than previous version and green mode equipped.
- Thermal control solution to avoid cold spots inside of the pump.
- Optimize pump size, easy for plug and play.
BENEFITS
- iPH pumps adopted suitable corrosive resistant materials to reduce their cost of ownership while maintaining a great lifetime.
- Able to handle a high volume of by-products while maintaining the safety level of applications running explosive gases.
- Designed to customize some processes that offer a high occurrence of powder that may lead to unplanned downtime due to accumulation within the vacuum pump.
APPLICATION
- Etch
- Implant
- HDP-CVD
- SACVD
- MOCVD
- PECVD
- LPCVD
- ALD
TECHNICAL SPECIFICATION
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PUMPING SPEED CURVE
Please refer to the video below for more information regards the pump.
For any inquiries regards this brand, please contact us at +604-2409243 or email our sales team at sales@cjenter.com.